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Frequency tuning of micro-beams using electrostatic pull-in

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris, Said Kafumbe

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Abstract

The work reported shows how the frequency of vibration of simple beam structures can be changed significantly through the action of electrostatic pull-in. The application of a voltage between a cantilevered beam and a supporting, but insulating, substrate will eventually cause the beam to become attached to the substrate. This changes the supporting conditions, the free length of the beam and thus its natural frequency. Test micro-beams have been fabricated from surface electro-deposited gold and the dynamic characteristics of these beams have been measured, for a range of 'pull in' voltages, using laser Doppler vibrometery.

Publication metadata

Author(s): Burdess JS, Harris AJ, Kafumbe SMM

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show

Year of Conference: 2006

Pages: 369-372

Publisher: NSTI

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