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The Newcastle University research output collection, currently available on ePrints, will shortly be moving to a new open repository platform, Figshare. To prepare for the data migration we have paused adding new content to ePrints, and will resume once the new repository is launched. During this time you will continue to have access to ePrints (but no new content will appear). We will share updates here when available.

Atomic layer deposition of Ti-HfO2 dielectrics

Lookup NU author(s): Dr Peter King

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Publication metadata

Author(s): Werner M, King PJ, Hindley S, Romani S, Mather S, Chalker PR, Williams PA, van den Berg JA

Publication type: Article

Publication status: Published

Journal: Journal of Vacuum Science & Technology A

Year: 2013

Volume: 31

Issue: 1

ISSN (print): 1071-8028

ISSN (electronic): 1944-2807

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1116/1.4748570

DOI: 10.1116/1.4748570


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