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The Newcastle University research output collection, currently available on ePrints, will shortly be moving to a new open repository platform, Figshare. To prepare for the data migration we have paused adding new content to ePrints, and will resume once the new repository is launched. During this time you will continue to have access to ePrints (but no new content will appear). We will share updates here when available.

Determination of mechanical parameters for rotating MEMS structures as a function of deposition method

Lookup NU author(s): Sorin Soare, Professor Steve BullORCiD, Dr Adrian OilaORCiD, Professor Anthony O'Neill, Professor Nick WrightORCiD, Dr Alton Horsfall, Roberto dos Santos Araujo

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Publication metadata

Author(s): Soare S, Bull SJ, Oila A, O'Neill A, Wright N, Horsfall A, dos Santos J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: MRS Fall Meeting 2003

Year of Conference: 2004


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